Semiconductor device and manufacturing method of semiconductor device

ABSTRACT

A semiconductor device includes a lower insulating layer formed on a primary surface of a semiconductor substrate; a sealing layer formed in contact with a top surface of the lower insulating layer; and a conductive member including a first conductive member formed on the sealing layer and having a first film thickness and a second conductive member formed on the sealing layer in contact with a first conductive member and having a second film thickness that is smaller than the first film thickness.

TECHNICAL FIELD

The present invention relates to a semiconductor device and amanufacturing method for a semiconductor device.

BACKGROUND ARTS

Wafer level CSP (chip size package) that is of the same size as thesemiconductor substrate and that connects circuit elements formed on theprimary surface of the semiconductor substrate to external elements viarewiring is used as the technology of packaging an LSI chip.

As a technology to suppress leakage of electromagnetic noise from thecircuit elements formed on the primary surface of the semiconductorsubstrate in the wafer level CSP, formation of a shield that covers theentire surface of the semiconductor substrate in which the rewiring isconnected to the ground of the circuit elements is proposed (JapanesePatent Application Laid-open Publication No. 2001-156209, for example).

SUMMARY OF THE INVENTION

When the rewiring that has a large film thickness is formed on thesurface of the semiconductor substrate by plating, the semiconductorsubstrate would warp. Also, the greater the pattern ratio of the thickwiring on the surface of the semiconductor substrate is, the greater theamount of warp in the semiconductor substrate is.

As in the conventional technology described above, if the thick rewiringis formed on the entire surface of the semiconductor substrate to formthe shield to suppress the electromagnetic noise from the circuitelements, the pattern ratio of the rewiring is great, which causes theamount of warp in the semiconductor substrate to exceed the allowablelevel in the manufacturing process, and as a result, a manufacturingdefect would occur.

For example, if the amount of warp in the semiconductor substrateexceeds the allowable level in the manufacturing process of the waferlevel CSP, a suction error would occur in the vacuum chuck orelectrostatic chuck for making the semiconductor substrate stick to thestage of the manufacturing equipment, which causes the process in themanufacturing equipment to stop.

In the photolithography process to form a resist pattern on the surfaceof the semiconductor substrate, off-focus would occur, which causes theresist pattern to have undesired dimensions. If the resist patterncannot be formed with the desired dimensions, the dimensions of othermembers such as insulating members and conductive members that areformed using the resist pattern as the reference would differ from theprescribed dimensions, and as a result, the semiconductor device wouldnot have the desired characteristics.

The present invention was made in view of the problems described above,and is aiming at providing a semiconductor device and a manufacturingmethod for a semiconductor device that can reduce the warp in thesemiconductor substrate while suppressing the electromagnetic noiseleakage and the effect of the external electromagnetic noise.

A semiconductor device of the present invention includes: a lowerinsulating layer formed on a primary surface of a semiconductorsubstrate; a sealing layer formed in contact with a top surface of thelower insulating layer; and a conductive member including a firstconductive member formed on the sealing layer and having the first filmthickness and a second conductive member formed on the sealing layer incontact with the first conductive member and having the second filmthickness that is smaller than the first film thickness.

A semiconductor device of the present invention includes: a lowerinsulating layer formed on a primary surface of a semiconductorsubstrate; a wiring layer formed on the lower insulating layer andhaving the first film thickness; and a shield portion formed on thelower insulating layer to be separated from at least two sides of thewiring layer by a prescribed distance, the shield portion having thesecond film thickness that is smaller than the first film thickness.

A manufacturing method of a semiconductor device of the presentinvention includes: a step of preparing a semiconductor substrate inwhich an electrode is formed; a first step of forming a lower insulatinglayer on a primary surface of the semiconductor substrate, the lowerinsulating layer having an opening to expose a part of a surface of theelectrode; a second step of forming an underbarrier metal (UBM) film ona surface of the lower insulating layer and the surface of the electrodethat is exposed through the opening, the UBM film being made of asealing layer and a seed layer; a third step of forming a firstconductive member having a first film thickness in a region thatcorresponds to the opening of the lower insulating layer; a fourth stepof forming a resist in a region that corresponds to a shield portion onthe seed layer; and a fifth step of removing the UBM film using theresist and the first conductive member as a mask to form a barrier metalportion.

According to the semiconductor device of the present invention, it ispossible to reduce the warp in the semiconductor substrate whilesuppressing the electromagnetic noise leakage and the effect of theexternal electromagnetic noise. This makes it possible to preventdefects from occurring due to the warp in the semiconductor substrate inthe manufacturing process of the semiconductor device.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a top view showing the top surface of a semiconductor device100.

FIG. 2A is a cross-sectional view showing a cross section along the lineX-X in FIG. 1.

FIG. 2B is a cross-sectional view showing a cross section along the lineY-Y in FIG. 1.

FIG. 2C is a cross-sectional view showing a cross section along the lineZ-Z in FIG. 1.

FIG. 3 is a flowchart showing the manufacturing steps of thesemiconductor device 100.

FIG. 4 is a flowchart showing the manufacturing steps of thesemiconductor device 100.

FIG. 5A is a cross-sectional view showing a cross section along the lineZ-Z in the wafer preparation step.

FIG. 5B is a cross-sectional view showing a cross section along the lineZ-Z in the lower layer insulating film forming step.

FIG. 5C is a cross-sectional view showing a cross section along the lineZ-Z in the thermosetting steps.

FIG. 5D is a cross-sectional view showing a cross section along the lineZ-Z in the UBM film forming step.

FIG. 6A is a cross-sectional view showing a cross section along the lineZ-Z in the wiring photolithography step.

FIG. 6B is a cross-sectional view showing a cross section along the lineZ-Z in the wiring plating step.

FIG. 6C is a cross-sectional view showing a cross section along the lineZ-Z in the shield portion photolithography step.

FIG. 6D is a cross-sectional view showing a cross section along the lineZ-Z in the UBM film removing step.

FIG. 7A is a cross-sectional view showing a cross section along the lineZ-Z in the upper layer insulating film forming step.

FIG. 7B is a cross-sectional view showing a cross section along the lineZ-Z in the thermosetting step.

FIG. 7C is a cross-sectional view showing a cross section along the lineZ-Z in the UBM film forming step.

FIG. 7D is a cross-sectional view showing a cross section along the lineZ-Z in the barrier metal portion photolithography step.

FIG. 8A is a cross-sectional view showing a cross section along the lineZ-Z in the barrier metal portion plating step.

FIG. 8B is a cross-sectional view showing a cross section along the lineZ-Z in the UBM film removing step.

FIG. 8C is a cross-sectional view showing a cross section along the lineZ-Z in the external connecting terminal forming step.

FIG. 9A is a diagram showing an etching step in the process ofconnecting the electrode pad to the shield portion in a comparisonexample.

FIG. 9B is a diagram showing an etching step in the process ofconnecting the electrode pad to the shield portion in a comparisonexample.

FIG. 9C is a diagram showing an etching step in the process ofconnecting the electrode pad to the shield portion in a comparisonexample.

FIG. 9D is a diagram showing an etching step in the process ofconnecting the electrode pad to the shield portion in a comparisonexample.

FIG. 10A is a diagram showing an etching step in the process ofconnecting the electrode pad to the shield portion in this embodiment.

FIG. 10B is a diagram showing an etching step in the process ofconnecting the electrode pad to the shield portion in this embodiment.

FIG. 10C is a diagram showing an etching step in the process ofconnecting the electrode pad to the shield portion in this embodiment.

FIG. 10D is a diagram showing an etching step in the process ofconnecting the electrode pad to the shield portion in this embodiment.

DETAILED DESCRIPTION OF THE INVENTION

Embodiments of the present invention will be explained below withreference to figures. In the descriptions of the embodiment below andappended figures, components and parts that are substantially the sameor equivalent to each other are given the same reference characters.

FIG. 1 is a top perspective view showing a part of a semiconductordevice 100 of the present invention shown from above the element formingsurface. FIG. 2A is a cross-sectional view along the line X-X in FIG. 1.FIG. 2B is a cross-sectional view along the line Y-Y in FIG. 1. FIG. 2Cis a cross-sectional view along the line Z-Z in FIG. 1.

The semiconductor device 100 has side walls that is cut by dicing, andhas a rectangular shape in a plan view (top view) as shown in FIG. 1.

As shown in FIGS. 2A to 2C, an interlayer insulating film 11 is formedon a semiconductor substrate 10 made of Si (silicon) of the firstconductivity type (such as p type). In the interlayer insulating film11, lower layer wiring 12 is formed.

On the interlayer insulating film 11, an electrode pad 13 and apassivation film 14, which functions as a protective layer, are formed.The electrode pad 13 is connected to the lower layer wiring 12 through aconnector L, and is therefore electrically connected to a circuitelement (not shown in the figure) formed on the semiconductor substrate10. The circuit element is connected to a fixed potential through theelectrode pad 13, or receives and transmits a signal through theelectrode pad 13. In the description below, some electrode pads 13 thatare connected to the fixed potential will also be referred to as theelectrode pads 13 a, and other electrode pads 13 that are used forsignal transmission and reception will also be referred to as theelectrode pads 13 b. The passivation film 14 is formed in such a waythat a part of the electrode pad 13 is exposed and the outer edges andside faces of the electrode pad 13 and the interlayer insulating film 11are covered.

On the passivation film 14, a lower insulating layer 15 is formed. Thelower insulating layer 15 covers the surface of the passivation film 14,and has an opening OP (shown in FIG. 1) to expose the surface of theelectrode pad 13 that is not covered by the passivation film 14. Theopening OP has a slanted side wall. The lower insulating layer 15 ismade of a photosensitive organic insulating film such as polyimide orPBO (Polybenzoxazole).

On the lower insulating layer 15, rewiring 16 is formed. One end of therewiring 16 is connected to the electrode pad 13 b via the opening OP ofthe lower insulating layer 15, and the other end thereof is connected tothe external connecting terminal 25. If the external connecting terminal25 is formed immediately above the electrode pad 13, the bottom surfaceof the rewiring 16 is connected to the electrode pad 13 via the openingOP of the lower insulating layer 15, and the top surface of the rewiring16 is connected to the external connecting terminal 25. The rewiring 16is constituted of a sealing layer 17 and a conductive layer 18.

The sealing layer 17 is made of a film having a high adhesion propertywith the lower insulating layer 15 such as Ti or TiW formed byspattering. The conductive layer 18 is formed on the sealing layer 17,and is made of Cu formed by plating. The sealing layer 17 isapproximately 150 mm-thick, and the conductive layer 18 is approximately5 μm-thick.

On the lower insulating layer 15, a shield 19 is formed. As shown inFIGS. 1 and 2B, the shield 19 is formed on the entire surface of thelower insulating layer 15 such that the shield 19 is separated from atleast two sides of the rewiring 16 by a prescribed distance, or theshield 19 surrounds the rewiring 16 while keeping a prescribed distancefrom the rewiring 16. The distance between the shield 19 and therewiring 16 is preferably 5 μm or greater, which is defined by theresolution and the overlap amount in the photolithography, but nogreater than 10 μm so that leakage of the electromagnetic noise can besuppressed. This way, it is possible to reduce the leakage ofelectromagnetic noise caused by the circuit element and to suppress theeffect of the external electromagnetic noise.

As shown in FIGS. 2A and 2C, the shield 19 is made of a shield portion20 that is thinner than the rewiring 16, and a wiring portion 21 thathas approximately the same thickness as the rewiring 16.

The wiring portion 21 is formed at the opening OP of the lowerinsulating layer 15 and the area P1 around the opening OP (see FIG. 2A),and at the opening AP of the upper insulating layer 23 and the area P2around the opening AP (see FIG. 2A). The wiring portion 21 formed at theopening OP of the lower insulating layer 15 and the surrounding area P1is formed to extend over a prescribed distance from the outercircumference of the opening OP on the top surface side of the lowerinsulating layer 15 and to entirely cover the opening OP in a plan view.The distance between an edge of the wiring portion 21 formed in thesurrounding area P1 and the outer circumference of the opening OP on thetop surface side of the lower insulating layer 15 is preferably about 2to 5 μm, considering the variations in dimensions in thephotolithography and the offset amount of the mask.

One part of the shield 19 is connected to the electrode pad 13 a, andthe other part of the shield 19 is connected to the external connectingterminal 25. This way, the shield 19 is connected to the ground terminalof the circuit element via the electrode pad 13 a, and is also connectedto the fixed potential via the external connecting terminal 25 and amounting substrate.

The shield 19 is constituted of the sealing layer 17 and the conductivemember 22. The conductive member 22 includes the first conductiveportion 22 a made of Cu formed by plating, and the second conductiveportion 22 b made of Cu formed by spattering. The first conductiveportion 22 a is formed to be approximately 5 μm-thick, and constitutesthe wiring portion 21 together with the sealing layer 17. The secondconductive portion 22 b is formed to be approximately 200 to 500nm-thick, and constitutes the shield portion 20 together with thesealing layer 17.

The upper insulating layer 23 is formed to cover the surface of thelower insulating layer 15, the rewiring 16, and the shield 19. The upperinsulating layer 23 has an opening AP (shown in FIG. 1) in an area thatincludes the other end of the rewiring 16 and a portion of the shield 19connected to the external connecting terminal 25. The upper insulatinglayer 23 is made of a photosensitive organic insulating film such aspolyimide, PBO (Polybenzoxazole), or a novolak-base organic insulatingfilm. The wiring portion 21 formed at the opening AP of the upperinsulating layer 23 and in the surrounding area P2 is formed to entirelycover opening AP in a plan view, and is formed in a region that isentirely covered by the external connecting terminal 25 in a plan view.As shown in FIG. 2A, the distance between the outer edge of the wiringportion 21 and an inner circumferential edge of the opening AP on thelower surface of the upper insulating layer 23 contacting the wiringportion 21 is preferably about 2 μm, considering the variations indimensions in the photolithography and the offset amount of the mask.

On the surface of the upper insulating layer 23, the barrier metalportion 24 is formed. The barrier metal portion 24 is to be connected tothe rewiring 16 and the shield 19 via the opening AP of the upperinsulating layer 23. As shown in FIG. 2A, the barrier metal portion 24is formed by laminating an Ni layer 24 c formed by plating on amultilayer film of a Ti layer 24 a and a Cu layer 24 b formed byspattering.

On the barrier metal portion 24, the external connecting terminal 25 isformed. The external connecting terminal 25 is connected to wiringformed on a substrate on which the semiconductor device 100 is to bemounted. In one embodiment, the external connecting terminal 25 is madeof SnAg.

As described above, in the semiconductor device 100 of this embodiment,the shield 19, which includes the wiring portion 21 having a larger filmthickness and formed by plating and the shield portion 20 having asmaller film thickness and formed by spattering, is formed on the entiresurface of the lower insulating layer 15. The majority of the areaexcept for the forming areas of the opening OP of the lower insulatinglayer 15 and the opening AP of the upper insulating layer 23 is theshield portion 20 having a smaller film thickness, and therefore, thepattern ratio of the wiring portion 21 having a larger film thickness tothe surface of the semiconductor substrate is low. Thus, the amount ofwarp in the semiconductor substrate is smaller than the case in whichthe entire surface is covered by the rewiring 16 and the shield that hasthe same film thickness as the rewiring 16. As a result, it is possibleto reduce manufacturing defects caused by the warp in the semiconductorsubstrate.

Next, the manufacturing method for the semiconductor device 100 will beexplained with reference to the manufacturing steps shown in FIGS. 3 and4. The respective steps will be explained with reference to FIGS. 5A to5D, FIGS. 6A to 6D, FIGS. 7A to 7D, and FIGS. 8A to 8C, respectively.Each diagram shows the cross-sectional view along the line Z-Z of FIG. 1(that is FIG. 2C).

As shown in FIG. 5A, a semiconductor wafer that includes a semiconductorsubstrate 10, a semiconductor element (not shown in the figure) formedon the semiconductor substrate 10, an interlayer insulating film 11covering the semiconductor substrate 10 and the semiconductor element,an electrode pad 13 formed on the interlayer insulating film 11 andconnected to the semiconductor element, and a passivation film(protection layer) 14 having an opening to expose a part of theelectrode pad 13 is prepared (wafer preparation step: STEP 101). Anexample of a semiconductor element formed on the semiconductor substrateis an active or switchable semiconductor element, such as a transistor,or a passive semiconductor element, such as a diode.

Next, the wafer of FIG. 5A undergoes a lower insulating film formingstep (STEP 102). Specifically, a lower insulating film 31 made of aphotosensitive material such as polyimide or PBO is coated on thepassivation film 14 and the electrode pad 13 by the spin coating methodor the like. Furthermore, an opening to expose the electrode pad 13 isformed by a known photolithography technique (exposure and development).This way, as shown in FIG. 5B, the lower insulating film 31 having anopening OP1 is formed.

The photolithography technique used in the photolithography process inthis lower insulating film forming step and the photolithographyprocesses described below may be of the positive type or negative type.In the positive type photolithography, light is radiated to the entirearea except for the area where the opening OP1 is to be formed, and thedevelopment process is performed, thereby forming the opening OP1.

Next, the wafer of FIG. 5B undergoes a thermosetting step (STEP 103).Specifically, by thermally curing the lower insulating film 31 in acuring furnace, a lower insulating layer 15 is formed. In this step, theside wall of the opening OP1 formed in the lower insulating film formingstep of STEP 102 is changed from a vertical wall to a tapered wall dueto the thermal contraction of the lower insulating film 31. This resultsin the lower insulating layer 15 with an opening OP2 having the outercircumference on the top surface side of the lower insulating layer 15and the inner circumference of the bottom surface side as shown in FIG.5C.

Next, the wafer of FIG. 5C undergoes an underbarrier metal (UBM) filmforming step (STEP 104). Specifically, a UBM film 32 that covers theentire surface of the lower insulating layer 15 including the side wallof the opening OP2 and the surface of the electrode pad 13 is formed.The UBM film 32 is formed by laminating Ti, which will be used for thesealing layer, and Cu, which will be used for the seed layer, byspattering. This way, as shown in FIG. 5D, the UBM film 32 made of a Tilayer 32 a (sealing layer) and a Cu layer 32 b (seed layer) is formed.

Next, the wafer of FIG. 5D undergoes a wiring portion photolithographystep (STEP 105). Specifically, a resist mask 33 having openings isformed, and through the openings, the UBM film 32 in the regions wherethe wiring portion 21 is to be formed is exposed. The resist mask 33 isformed by first forming a resist on the wafer by the spin coatingmethod, and thereafter performing the exposure and developmentprocesses. This way, the resist mask 33 as shown in FIG. 6A is formed.

Next, the wafer of FIG. 6A undergoes a wiring portion plating step (STEP106). Specifically, the surface of the wafer is immersed into a platingbath, and a voltage is applied to the UBM film, thereby depositing Cu inan area corresponding to the openings of the resist mask 33. Thereafterby performing ashing with an ashing machine or immersing the wafer intoan organic removal solution, the resist is removed. This way, as shownin FIG. 6B, the conductive layer 18 and the first conductive member 22 aof the conductive member 22 are formed.

Next, the wafer of FIG. 6B undergoes a shield portion photolithographystep (STEP 107). Specifically, a resist mask 34 is formed to cover thearea where the shield portion 20 is formed. It is not necessary toentirely cover the first conductive member 22 a of the conductive member22 with the resist mask 34 in this step, because the resist mask 34 andthe first conductive member 22 a of the conductive member 22 are usedfor a mask in an etching process conducted in the subsequent UBM filmremoving step. This way, the resist mask 34 as shown in FIG. 6C isformed.

Next, the wafer of FIG. 6C undergoes a UBM film removing step (STEP108). Specifically, the Cu layer 32 b and the Ti layer 32 a are removedin this order by wet etching. In the etching process for the Cu layer 32b, the first conductive member 22 a (Cu) of the conductive member 22 andthe resist mask 34 function as the etching mask. In the etching processfor the Ti layer 32 a, the first conductive member 22 a (Cu) of theconductive member 22 and the resist mask 34 function as the etchingmask. After the UMB film 32 is removed, by performing ashing with anashing machine or immersing the wafer into an organic removal solution,the resist mask 34 is removed. This way, as shown in FIG. 6D, the shield19 made of the rewiring 16, the shield portion 20, and the wiringportion 21 is formed.

Next, the wafer of FIG. 6D undergoes an upper insulating film formingstep (STEP 109). Specifically, an upper insulating film 35 made ofpolyimide, PBO, or a novolak-base material is coated on the lowerinsulating layer 15, the rewiring 16, the wiring portion 21, and theshield portion 20 by the spin coating method or the like. Furthermore,openings to expose a part of the rewiring 16 and a part of the wiringportion 21 are formed by a known photolithography technique (exposureand development). This way, as shown in FIG. 7A, the upper insulatingfilm 35 having the openings AP1 is formed.

Next, the wafer of FIG. 7A undergoes a thermosetting step (STEP 110).Specifically, by thermally curing the upper insulating film 35 in acuring furnace, an upper insulating layer 23 is formed. In this step,the side wall of each opening AP1 formed in the upper insulating filmforming step of STEP 109 is changed from a vertical wall to a taperedwall due to the thermal contraction of the upper insulating film 35.This way, as shown in FIG. 7B, the upper insulating film 23 having theopenings AP2 is formed.

Next, the wafer of FIG. 7B undergoes a UBM film forming step (STEP 111).Specifically, an UBM film 36 is formed to cover the entire surface ofthe upper insulating layer 23 including the side wall of each openingAP2 and the surfaces of the rewiring 16 and the wiring portion 21exposed through the openings AP2. The UBM film 36 is formed bylaminating Ti, which will be used for the sealing layer, and Cu, whichwill be used for the seed layer, by spattering. This way, as shown inFIG. 7C, the UBM film 36 made of a Ti layer 36 a (sealing layer) and aCu layer 36 b (seed layer) is formed.

Next, the wafer of FIG. 7C undergoes a barrier metal portionphotolithography step (STEP 112). Specifically, a resist mask 37 havingopenings is formed, and through the openings, the UBM film 36 in theareas where the barrier metal portion 24 is to be formed is exposed. Theresist mask 37 is formed by a known photolithography technique. Thisway, the resist mask 37 as shown in FIG. 7D is formed.

Next, the wafer of FIG. 7D undergoes a barrier metal portion platingstep (STEP 113). Specifically, the surface of the wafer is immersed intoa plating bath, and a voltage is applied to the UBM film 36, therebydepositing Ni in areas corresponding to the openings of the resist mask37. Thereafter by performing ashing with an ashing machine or using anorganic removal solution, the resist is removed. This way, an Ni layer24 c as shown in FIG. 8A is formed.

Next, the wafer of FIG. 8A undergoes a UBM film removing step (STEP114). Specifically, the Cu layer 36 b and the Ti layer 36 a are removedin this order by wet etching using the Ni layer 24 c as a mask. Afterthe UMB film 36 is removed, by performing ashing with an ashing machineor immersing the wafer into an organic removal solution, the resist isremoved. This way, as shown in FIG. 8B, the UBM film 36 is removed fromthe upper insulating layer 23, and the barrier metal portion 24 made ofthe Ti layer 24 a, the Cu layer 24 b, and the Ni layer 24 c is formed.

Next, the wafer of FIG. 8B undergoes an external connecting terminalforming step (STEP 115). Specifically, first, solder terminals mainlymade of Sn—Ag are formed on the barrier metal portion 24 by solderprinting (silk printing) or ball mounting. After arranging the solderterminals, reflow is performed, thereby forming the external connectingterminals 25 on the barrier metal portion 24. This way, as shown in FIG.8C, the wafer with the external connecting terminals 25 is formed.

Next, the wafer of FIG. 8C undergoes a semiconductor substrate grindingstep (STEP 116). Specifically, after placing a protective tape on thesurface of the wafer, the rear surface of the wafer is grinded by agrinder, thereby reducing the thickness of the wafer.

Next, the thinned wafer undergoes a dicing step (STEP 117).Specifically, after removing the protective tape from the surface of thewafer, a dicing tape is placed on the rear surface of the wafer, and thewafer is cut into respective chips by a dicer.

The semiconductor device 100 is manufactured through the manufacturingprocess described above.

In the semiconductor device 100 of this embodiment, the shield 19, whichis constituted of the wiring portion 21 having a larger film thicknessand formed by plating and the shield portion 20 having a smaller filmthickness and formed by spattering, is formed on the entire surface ofthe lower insulating layer 15. The majority of the area except for theportions to be connected to the electrode pads 13 and the externalconnecting terminals 25 (the forming areas of the openings OP of thelower insulating layer 15 and the openings AP of the upper insulatinglayer 23) is the shield portion 20 having a smaller film thickness, andtherefore, the pattern ratio of the wiring portion 21 having a largerfilm thickness to the surface of the semiconductor substrate is low.Thus, the amount of warp in the semiconductor substrate is smaller thanthe case in which the entire surface is covered by the rewiring 16 andthe shield that has the same film thickness as the rewiring 16.

As a result, with the semiconductor device 100 of this embodiment, theamount of warp in the semiconductor substrate is reduced, whichdecreases the occurrence of the manufacturing defects caused by thewarp, while suppressing leakage of the electromagnetic wave from thesemiconductor device 100 or the effects of the external electromagneticwaves.

In the manufacturing method of the semiconductor device 100 of thisembodiment, the shield portion 20 and the electrode pad 13 exposedthrough the opening OP of the lower insulating layer 15 are connectedthrough the wiring portion 21. This way, it is possible to suppress adefect that occurs in the process of connecting the shield portion 20 tothe electrode pad 13 by a spattering film. Below, how such a defectoccurs and how it is suppressed will be explained with reference toFIGS. 9A to 9D (comparison example) and FIGS. 10A to 10D (thisembodiment).

In order to connect the electrode pad to the shield portion by aspattering film, generally, the spattering film is patterned by wetetching using a resist mask. For example, as shown in FIG. 9A, which isa comparison example, the multilayer film of the sealing layer 40 (Ti)and the conductive film 41 (Cu) formed by spattering is patterned usingthe resist film 42 as a mask.

The resist film 42 and the conductive film 41 do not adhere to eachother completely, and thus, as shown in FIG. 9B, the etching of theconductive film 41 proceeds to the side wall of the opening of the lowerinsulating layer 15. The spattering film formed on the slanted side wallof the opening has a lower density, and therefore, the etching ratethereof is higher. For this reason, if the resist pattern gets closer tothe outer circumference of the opening of the lower insulating layer 15on the top surface side of the lower insulating layer 15 due to areduction in a gap (clearance) between the opening and the shieldportion caused by shrink, an offset error of lithography in thephotolithography step, or an increase in size of the top part of theopening in the lower insulating layer 15 caused by the heat contractionof the lower insulating film in the thermosetting step, for example, theetching proceeds up to the middle point of the side wall of the openingof the lower insulating layer 15 because the conductive film 41 formedon the side wall of the opening of the lower insulating layer 15 has ahigher etching rate.

In the subsequent etching step for the sealing layer 40, the sealinglayer 40 is etched using the conductive film 41, which has been etchedup to the side wall of the opening of the lower insulating layer 15. Theetching of the sealing layer 40 starts from the side wall of the openingof the lower insulating layer 15, and because the spattering film formedon the side wall of the opening of the lower insulating layer 15 that isslanted has a lower density and higher etching rate as described above,the etching proceeds to a point near the electrode pad 13 exposed at thebottom of the opening as shown in FIG. 9C. Thus, the Ti etching solutionfor the sealing layer 40 is likely to remain in the slit between thelower insulating layer 15 and the conductive film 41.

The etching solution RE left in the slit between the conductive film 41and the lower insulating layer 15 remains inside of the semiconductordevice as shown in FIG. 9D because of the formation of the upperinsulating layer 23. This remaining etching solution RE graduallycorrodes the sealing layer 40 between the electrode pad 13 and theconductive film 41, and could cause disconnection between the electrodepad 13 and the conductive film 41 if use for a long time.

On the other hand, in the manufacturing method of the semiconductordevice 100 of this embodiment, as shown in FIG. 10A, the firstconductive member 22 a of the conductive member 22 formed by platingfunctions as the mask for the conductive film 41. When the firstconductive member 22 a of the conductive member 22 is formed by platingusing the conductive film 41 as a seed layer, the conductive film 41formed on the side wall of the opening of the lower insulating layer 15is taken in by the first conductive member 22 a of the conductive member22. The density of the conductive film 41 taken in by the firstconductive member 22 a of the conductive member 22 is the same as thedensity of the plating film, and the etching rate thereof isapproximately 1/10 of the conductive film 41 formed by spattering.Therefore, even if the end portion of the wiring portion 21 gets closerto the outer circumference of the opening of the lower insulating layer15 on the top surface side of the lower insulating layer 15, the firstconductive member 22 a of the conductive member 22 is not susceptible tothe side etching due to the etching step, and as shown in FIG. 10B, theetching of the conductive film 41 formed by spattering starts at the topsurface of the lower insulating layer 15 and does not reach the sidewall of the opening.

As shown in FIG. 10C, in the etching step on the sealing layer 40, thefirst conductive member 22 a of the conductive member 22 on the surfaceof the opening is used as a mask. Thus, the etching of the sealing layer40 does not proceed to a portion with a higher etching rate, which isformed in the side wall of the opening. As shown in FIG. 10D, no slit isformed between the lower insulating layer 15 and the first conductivemember 22 a of the conductive member 22, and therefore, the etchingsolution is not left in the semiconductor device, and no connectiondefect would occur even with the long-term use.

In the semiconductor device 100 of this embodiment, areas exposedthrough the openings AP of the upper insulating layer 23 are respectiveparts of the wiring portion 21. This makes it possible to reduce thenumber of opening defects that occur in the process of forming theopenings AP in the upper insulating layer 23. Explained below is howsuch opening defects are suppressed.

The upper insulating layer is generally made of a photosensitive organicinsulating film. If a negative-type photosensitive organic insulatingfilm is used for the upper insulating film, and if areas exposed throughthe openings of the upper insulating layer are those of a spatteringfilm, the exposure process would require a longer time because the filmthickness of the upper insulating film that is subjected to the exposureprocess is greater than the case in which the exposed areas are thewiring portion. If the exposure was insufficient, a part of the organicinsulating film would remain at the bottom of each opening after thedevelopment process following the exposure process.

On the other hand, if a positive-type photosensitive organic insulatingfilm is used for the upper insulating film, and if areas exposed throughthe openings of the upper insulating layer are those of a spatteringfilm, the development process would require a longer time because thefilm thickness of the upper insulating film that is to be removed by thedevelopment is greater than the case in which the exposed areas are thewiring portion. If the development time was too short, a part of theorganic insulating film would remain at the bottom of each opening.

This remaining part of the organic insulating film hiders the electricalconnection between the external connecting terminal formed on the upperinsulating layer and the shield portion, which would cause erroneousoperation of the semiconductor device. In order to eliminate the filmresidue, the exposure process or the development process needs to besufficiently long, but the excessive amount of exposure or developmenttime would cause defects such as the dimensions of the opening being toolarge, or the shape of the opening being abnormal.

On the other hand, in the semiconductor device 100 of this embodiment,the areas exposed through the openings AP of the upper insulating layer23 are the wiring portion, and therefore, the exposure amount or thedevelopment time does not need to be great. Thus, defects caused by theresidue of the organic insulating film, such as erroneous operation ofthe semiconductor device, or dimensional error and abnormal shape of theopening, would not occur.

The present invention is not limited to the respective embodimentsabove. For example, in this embodiment, the barrier metal portion 24 wasa multilayer film made of Ti/Cu/Ni, but the present invention is notlimited to this, and the barrier metal portion 24 may be a multilayerfilm of Ti/Ni, TiW/Cu/Ni, TiW/Ni, or the like. That is, the barriermetal portion 24 may have any configuration as long as it includes asealing layer made of Ti or TiW, and Ni.

In this embodiment, a photosensitive organic insulating film was used asan example, but the present invention is not limited to this, and it ispossible to use a non-photosensitive organic insulating film for thelower insulating layer 15 and the upper insulating layer 23. In thiscase, the openings OP2 and AP2 are formed by the thermosetting stepafter the openings OP1 and AP1 are formed by etching.

DESCRIPTIONS OF THE REFERENCE CHARACTERS

-   -   100 Semiconductor device    -   10 Semiconductor substrate    -   11 Interlayer insulating film    -   12 Lower layer wiring    -   13 Electrode pad    -   14 Passivation film    -   15 Lower insulating layer    -   16 Rewiring    -   17 Sealing layer    -   18 Conductive layer    -   19 Shield    -   20 Shield portion    -   21 Wiring portion    -   22 Conductive member    -   22 a First conductive member    -   22 b Second conductive member    -   23 Upper insulating layer    -   24 Barrier metal portion    -   24 a Ti layer    -   24 b Cu layer    -   24 c Ni layer    -   25 External connecting terminal    -   31 Lower insulating film    -   32 UMB film    -   32 a Ti layer    -   32 b Cu layer    -   33 Resist mask    -   34 Resist mask    -   35 Upper insulating film    -   36 UMB film    -   36 a Ti layer    -   36 b Cu layer    -   37 Resist mask    -   40 Sealing layer    -   41 Conductive film    -   42 Resist film    -   OP, AP Opening

What is claimed is:
 1. A semiconductor device, comprising: a lowerinsulating layer formed on a primary surface of a semiconductorsubstrate; a sealing layer formed in contact with a top surface of thelower insulating layer; and a conductive member including a firstconductive member formed on the sealing layer and having a first filmthickness and a second conductive member formed on the sealing layer incontact with the first conductive member and having a second filmthickness that is smaller than the first film thickness.
 2. Thesemiconductor device according to claim 1, wherein the lower insulatinglayer is formed such that a bottom surface of the lower insulatinglayer, opposite to the top surface, is in contact with a surface of anelectrode, and the lower insulating layer has a first opening thatexposes a part of the surface of the electrode, the first opening havingan outer circumference on the top surface side, an inner circumferenceon the bottom surface side, and a tapered side wall connecting the outercircumference and the inner circumference, wherein the sealing layerextends over the top surface of the lower insulating layer, the sidewall of the first opening, and the surface of the electrode exposedthrough the first opening, and wherein the first conductive member isconnected to the electrode through the first opening, and a region ofthe first conductive member corresponding to the top surface of thelower insulating layer in a plan view entirely covers the outercircumference of the first opening.
 3. The semiconductor deviceaccording to claim 1, further comprising: an upper insulating layerformed on the conductive member and having a second opening that exposesa part of a surface of the first conductive member; and an externalconnecting terminal formed on a surface of the upper insulating layerand connected to the first conductive member through the second opening.4. The semiconductor device according to claim 3, wherein a region ofthe external connecting terminal that corresponds to the surface of theupper insulating layer in a plan view entirely covers a region of thefirst conductive member that corresponds to the surface of the upperinsulating layer.
 5. The semiconductor device according to claim 1,wherein the conductive member includes a first part of the firstconductive member, a second part of the first conductive member that isseparated from the first part of the first conductive member, and thesecond conductive member that is in contact with the first part of thefirst conductive member and the second part of the first conductivemember, wherein the first part of the first conductive member isconnected to an electrode through an opening of the lower insulatinglayer, and wherein the second part of the first conductive member isconnected to an external connecting terminal.
 6. The semiconductordevice according to claim 3, wherein the external connecting terminal isconnected to the first conductive member via a barrier metal portion. 7.The semiconductor device according to claim 6, further comprising awiring layer having the sealing layer and a conductive layer having thefirst film thickness and formed on the top surface of the lowerinsulating layer, wherein the second conductive member and the sealinglayer corresponding to the second conductive member extend over the topsurface of the lower insulating layer and are positioned in closevicinity of, but separated from at least two sides of the wiring layerby a prescribed distance.
 8. The semiconductor device according to claim7, wherein the second conductive member and the sealing layercorresponding to the second conductive member are formed to surround thewiring layer while keeping a prescribed distance from the wiring layer.9. The semiconductor device according to claim 3, wherein the conductivemember is connected to a fixed potential via the external connectingterminal.
 10. The semiconductor device according to claim 1, wherein thefirst conductive member is formed by plating, and the second conductivemember is formed by spattering.
 11. A semiconductor device, comprising:a lower insulating layer formed on a primary surface of a semiconductorsubstrate; a rewiring layer formed on the lower insulating layer andhaving a first film thickness; and a shield having a shield portionformed on the lower insulating layer to have a prescribed distance fromat least two sides of the rewiring layer, the shield portion having asecond film thickness that is smaller than the first film thickness. 12.The semiconductor device according to claim 11, wherein the shieldportion surrounds the rewiring layer in such a way that the shieldportion is separated from the rewiring layer by a prescribed distance.13. The semiconductor device according to claim 11, further comprising:an upper insulating layer that covers the lower insulating layer, therewiring layer, and the shield portion; and an external connectingterminal formed on a surface of the upper insulating layer, the externalconnecting terminal including a first external connecting terminalelectrically connected to the shield portion and a second externalconnecting terminal connected to one end of the rewiring layer.
 14. Thesemiconductor device according to claim 13, wherein another end of therewiring layer is connected to an electrode through an opening of thelower insulating layer.
 15. The semiconductor device according to claim13, wherein the shield includes a wiring portion formed on the lowerinsulating layer and having the first film thickness, wherein the firstexternal connecting terminal is connected to the wiring portion throughan opening of the upper insulating layer that exposes the wiringportion, and wherein the shield portion is connected to the wiringportion and is further connected to the first external connectingterminal via the wiring portion.
 16. The semiconductor device accordingto claim 13, wherein the shield portion is connected to a fixedpotential via the external connecting terminal.
 17. A manufacturingmethod of a semiconductor device, comprising: preparing a semiconductorsubstrate in which an electrode is formed; forming a lower insulatinglayer on a primary surface of the semiconductor substrate, the lowerinsulating layer having an opening to expose a part of a surface of theelectrode; forming an underbarrier metal (UBM) film on a surface of thelower insulating layer and the surface of the electrode that is exposedthrough the opening, the UBM film being made of a sealing layer and aseed layer; forming a first conductive member having a first filmthickness in a region that corresponds to the opening of the lowerinsulating layer; forming a resist in a region that corresponds to ashield portion on the seed layer; and removing the UBM film using theresist and the first conductive member as a mask and forming a barriermetal portion.
 18. The manufacturing method of a semiconductor deviceaccording to claim 17, wherein, forming the first conductive memberincludes forming a conductive layer at a prescribed distance from theregion that corresponds to the shield portion, and wherein the UBM filmis removed using the resist, the first conductive member, and theconductive layer as a mask.
 19. The manufacturing method of asemiconductor device according to claim 17, wherein the UBM film isformed by laminating the sealing layer and the seed layer by spattering.20. The manufacturing method of a semiconductor device according toclaim 17, wherein the seed layer and the sealing layer are removed bywet-etching.